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Silicon oxide in Si-Si bonded wafers
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2001
Journal Article
Titel
Silicon oxide in Si-Si bonded wafers
Author(s)
Himcinschi, C.
Milekhin, A.
Friedrich, M.
Hiller, K.
Wiemer, M.
Gessner, T.
Schule, S.
Zahn, D.R.T.
Zeitschrift
Applied surface science
DOI
10.1016/S0169-4332(01)00146-5
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM