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Process modeling of the industrial VGF growth process using the software package CrysVUN++
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2000
Journal Article
Titel
Process modeling of the industrial VGF growth process using the software package CrysVUN++
Author(s)
Backofen, R.
Kurz, M.
Müller, G.
Zeitschrift
Journal of Crystal Growth
DOI
10.1016/S0022-0248(99)00792-7
Language
English
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