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Self-polarization and texture of wet chemically derived lead zirconate titanate thin films

: Frey, J.; Schlenkrich, F.; Schönecker, A.


Integrated ferroelectrics 35 (2001), Nr.1-4, S.105-113
ISSN: 1058-4587
Fraunhofer IKTS ()
lead titanate; polarization

A multilayer structure of Si/SiO2/Ti/Pt/TiO2 was used as a bottom electrode for pyroelectric Pb(Zr0.25Ti0.75)O3 (PZT) thin films. A wet chemical approach was used for PZT deposition. The interrelations between the bottom electrode and the crystallographic orientation of the PZT thin films as well as correlations between microstructure and electric properties were studied. Annealing of Ti/Pt electrodes prior to PZT deposition caused Ti diffusion and oxidation, which influenced texture and film quality. The combination of a sputtered TiO2 seed layer with an intermediate heating step at .approximately 400 degree yielded dense and columnar PZT(111). The films showed a pyroelectric coeffecient and a built-in polarity after preparation.