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Investigation of interlayer phenomena in Ti/Pt electrodes for ferroelectric thin film devices

: Frey, J.; Schönecker, A.; Schlenkrich, F.; Thomas, J.; Hermel, W.

Zeitschrift für Metallkunde 92 (2001), Nr.2, S.141-145
ISSN: 0044-3093
ISSN: 0179-4841
Fraunhofer IKTS ()
ferroelectric thin film

The paper deals with the interrelations between prepn. and microstructure of a Si/SiO2/Ti/Pt/TiO2/Pb(Zr,Ti)O3 multilayer configuration. A wet chem. approach was used for Pb(Zr,Ti)O3 (PZT) deposition on sputtered Ti/Pt thin films. The chosen sol-gel process allows heterogeneous nucleation of PZT on the underlying Pt electrode at a temp. of without interference of Ti diffusion from the Ti interlayer. In this case the texture of the PZT film can be switched from (100) to (111) by the thin TiO2 interlayer on top of the Pt (111). This knowledge is essential for the fabrication of ferroelec. thin film devices with tailored properties.