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Microscopic formtesting of large area microstructures by means of formtesting interferometry

: Schneefuß, K.; Pfeifer, T.

European Society for Precision Engineering and Nanotechnology -EUSPEN-:
Euspen 2nd International Conference 2001. Proceedings
Turin, 2001
S.482-486 (Vol. 1)
European Society for Precision Engineering and Nanotechnology (International Conference) <2, 2001, Turin>
Fraunhofer IPT ()
microstructure; nanostructure; interferometry; measurement; micromachining; large-area microstructure

Innovative production technologies make it possible to manufacture large area micro-structured surfaces. A new aim for measurement technologies is to cover the process chain during the production of these 3D-nano- and microstructures. At the Fraunhofer IPT the global form of the shaping-matrices is investigated because it determines the functionality of the components most significantly. Very fast interferometrical large-area measurement concepts are developed for the examination of the surface and to be moved in a prototype. The possibilities of interferometrical form testing of prisms, gratings or spherical lens arrays are adapted to the microscopic range. Especially for the characterization of the gratings the measurement range has been extended by using multiple wavelength interferometry.