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Fiber-optic interferometer for absolute distance measurements with high measuring frequency

: Bosbach, Christof; Driessen, Sascha; Pfeifer, Tilo; Michelt, Bertold

European Society for Precision Engineering and Nanotechnology -EUSPEN-:
Euspen 2nd International Conference 2001. Proceedings
Turin, 2001
S.278-281 (Vol. 2)
European Society for Precision Engineering and Nanotechnology (International Conference) <2, 2001, Turin>
Fraunhofer IPT ()
Innovationsmanagement; Innovationsprozeß; TRIZ; interferometry; fiber-optics; MOEMS; distance measurement; Messtechnik; Abstandsmessung

White light interferometry or coherence radar are well known and established measurement techniques for years. But especially the field of production technology and medical technology need measurement Systems with continuously increasing performance. This paper demonstrates, how the use of special optical components for higher measurement frequencies and the miniaturizing of the sensor tip can enlarge the application fields for this System. First, a short overview regarding the main focuses of the project is given. The fundamental aspects of white light interferometry lead to the new concept of a distance measurement System. It is shown how the inset of a special stepped mirror in the detection interferometer increases the measurement frequency and how the sensor is miniaturized using the Fresnel-reflection.