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PVD coating of plastic webs and sheets with high rates on large areas

: Schiller, S.; Kirchhoff, V.; Schiller, N.; Morgner, H.


Surface and coatings technology 125 (2000), Nr.1-3, S.354-360
ISSN: 0257-8972
European Materials Research Society (Spring Meeting) <1999, Strasbourg>
Zeitschriftenaufsatz, Konferenzbeitrag
Fraunhofer FEP ()

For many product applications plastic material needs to be coated with transparent oxide layers to obtain the required properties like permeation barrier, abrasion resistance, anti-reflection and defined optical transmission for example. First of all, outstanding properties of coated material are needed in comparison to competitive technologies. Beyond this acceptable cost for market are decisive for introduction of PVD technologies into production. The paper gives an overview about the great variety of applications. Deposition rate has a strong influence on coating cost. The higher the rates the lower the cost. High rates, especially for deposition of oxides, are often considered as linked to poor layer quality. Plasma activation of vapor is a way for getting high rates and acceptable properties. Hollow cathode activated deposition process (HAD) and pulsed magnetron sputtering (PMS) will be explained. Results concerning layer properties will be depicted. An outlook to the future will be derived.