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A silicon micropump with a high bubble tolerance and self-priming capability
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1999
Conference Paper
Titel
A silicon micropump with a high bubble tolerance and self-priming capability
Author(s)
Woias, P.
Linnemann, R.
Richter, M.
Leistner, A.
Hillerich, B.
Hauptwerk
Micro total analysis systems '98. Proceedings of the My-TAS '98 Workshop
Konferenz
Micro-TAS Workshop 1998
Language
English
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Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS