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Advanced silicon bulk micromachining for angular rate sensor
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1999
Conference Paper
Titel
Advanced silicon bulk micromachining for angular rate sensor
Author(s)
Wiemer, M.
Hiller, K.
Gessner, T.
Billep, D.
Ryrko, B.
Breng, U.
Zimmermann, S.
Gutmann, W.
Hauptwerk
Sensor '99. Proceedings. Vol.2
Konferenz
Sensor 1999
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM