Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Simulation of dry silicon etching in the absence of ion bombardment
An example for cooperation between process development and equipment design
| McKeown, P. ; European Society for Precision Engineering and Nanotechnology -EUSPEN-:
Precision Engineering - Nanotechnology. Proceedings of the 1st International EUSPEN Conference. Vol.2
Aachen: Shaker, 1999 (Berichte aus der Fertigungstechnik)
ISBN: 3-8265-6085-X
S.88-91 |
| European Society for Precision Engineering and Nanotechnology (International Conference and General Meeting) <1, 1999, Bremen> |
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| Englisch |
| Konferenzbeitrag |
| Fraunhofer IZM () |