Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Simulation of dry silicon etching in the absence of ion bombardment

An example for cooperation between process development and equipment design
 

McKeown, P. ; European Society for Precision Engineering and Nanotechnology -EUSPEN-:
Precision Engineering - Nanotechnology. Proceedings of the 1st International EUSPEN Conference. Vol.2
Aachen: Shaker, 1999 (Berichte aus der Fertigungstechnik)
ISBN: 3-8265-6085-X
S.88-91
European Society for Precision Engineering and Nanotechnology (International Conference and General Meeting) <1, 1999, Bremen>
Englisch
Konferenzbeitrag
Fraunhofer IZM ()

: http://publica.fraunhofer.de/dokumente/B-63030.html