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Infrared study of the Si surfaces and buried interfaces
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1999
Journal Article
Titel
Infrared study of the Si surfaces and buried interfaces
Author(s)
Milekhin, A.
Friedrich, M.
Wiemer, M.
Hiller, K.
Gessner, T.
Zahn, D.R.T.
Zeitschrift
Journal of vacuum science and technology B. Microelectronics and nanometer structures
Konferenz
Conference on the Physics and Chemistry of Semiconductor Interfaces 1999
DOI
10.1116/1.590843
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM