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Investigation of heat transfer in micromirrors
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1999
Conference Paper
Titel
Investigation of heat transfer in micromirrors
Author(s)
Kehr, K.
Kurth, S.
Mehner, J.
Dötzel, W.
Gessner, T.
Hauptwerk
Microsystems metrology and inspection
Konferenz
Conference on Microsystems Metrology and Inspection 1999
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM