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A design and production framework for modular microsystems
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1999
Conference Paper
Titel
A design and production framework for modular microsystems
Author(s)
Großer, V.
Schünemann, M.
Michel, B.
Reichl, H.
Hauptwerk
Proceedings of the 1999 International Symposium on Micromechatronics and Human Science
Konferenz
International Symposium on Micromechatronics and Human Science (MHS) 1999
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM