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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

µCORS - a bulk micromachined gyroscope based on coupled resonators

 
: Breng, U.; Gutmann, W.; Leinfelder, P.; Ryrko, B.; Zimmermann, S.; Billep, D.; Gessner, T.; Hiller, K.; Wiemer, M.

Okuyama, M.; Mitsuhasi, W.; Yamashita, K.:
Transducers '99, 10th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
Tokyo: Institute of Electrical Engineers of Japan, 1999
S.1570-1573 (Vol.2)
International Conference on Solid-State Sensors and Actuators <10, 1999, Sendai>
Englisch
Konferenzbeitrag
Fraunhofer IZM ()

: http://publica.fraunhofer.de/dokumente/B-62987.html