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Electrostatically driven micromirrors for a miniaturized confocal laser scanning microscope

: Hofmann, U.; Mühlmann, S.; Schütz, R.; Dörschel, K.; Wagner, B.; Witt, M.

Motamedi, M.E.; Goering, R. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Miniaturized systems with micro-optics and MEMS
Bellingham, Wash.: SPIE, 1999 (SPIE Proceedings Series 3878)
ISBN: 0-8194-3475-2
Conference on Miniaturized Systems with Micro-Optics and MEMS <1999, Santa Clara/Calif.>
Fraunhofer ISIT ()

A compact two-mirror microscanner has been fabricated to build the central part of a miniaturized confocal laser scanning microscope. This microscope shall be mounted at the tip of an endoscope to provide high resolution imaging for medical diagnostics. In order to achieve a resolution of 500 X 500 image elements large scan angles and also large mirror dimensions have to be realized within a spatially strong limited housing. While bulk silicon technology on the one hand enables fabrication of micromirrors with nearly ideal elastical behavior, those actuators on the other hand often are too fragile for a lot of applications. This paper describes the design, fabrication and assembling of electrostatically driven torsional micromirrors that meet the requirements of fast two-dimensional scanning with high angular precision over large scan angles, compact design and also high shock resistance. This is achieved with the combination of bulk silicon technology with metal surface micromachining. Besides medical diagnostics these microscanners can be used in a wider range of applications such as displays, two-dimensional barcode scanning, multiplexing of fiber optics, etc.