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Self-organized structuring of W/C multilayers on Si substrate

: Meyer, D.C.; Klingner, A.; Holz, T.; Paufler, P.

Applied physics. A 69 (1999), S.657-659
ISSN: 0340-3793
ISSN: 0721-7250
ISSN: 0947-8396
Fraunhofer IWS ()
Nanotechnologie; nm-Präzisionsschicht; Multischicht; Nanomaterialien; Grenzfläche

After aging at room temperature for several months W/C multilayers (20 periods, single layer thicknesses in the nanometer range) grown on Si-(111) substrates by pulsed laser deposition (PLD) developed homogeneously wrinkled surfaces. Their structures were studied by optical microscopy, atomic force microscopy and X-Ray diffractometry. Typical dimensions of debonded areas are some 100µm in length, about 40 mu m in width and 2-3 mu m in height. The formation of wrinkles is accompanied by an increase in the free surface by 1%-2%. Stress relaxation is considered the driving force of this phenomenon.