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Microsystems CAD. From FEM to system simulation

: Schwarz, P.

Meyer, K. de; Biesemans, S.:
SISPAD 98. Simulation of semiconductor processes and devices
Wien: Springer, 1998
ISBN: 3-211-83208-4
International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) <3, 1998, Leuwen>
Fraunhofer IIS A ( IIS) ()

Microsystem technology is a highly interdisciplinary area. Therefore, a combination of different CAD methods and tools is necessary for supporting microsystem design. Process and device simulation are basic CAD methods but more and more higher levels of abstraction need to be applied in order to analyze microsystems adequately. This paper summarizes several modeling and simulation strategies for system simulation of microsystems on different levels of abstraction: generalized Kirchhoffian networks, black-box models, macromodels, the application of hardware description languages, and simulator coupling.