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Microcharacterization of high-performance ceramics with scanning atomic force microscopy

 
: Obenaus, P.

Mücklich, F.:
Fortschritte in der Metallographie. Vortragstexte der 34. Metallographie-Tagung : 13. - 15. September 2000 in Saarbrücken
Frankfurt: Werkstoff-Informationsgesellschaft, 2001 (Praktische Metallographie, Sonderband 32)
ISBN: 3-88355-296-8
S.189-192
Metallographie-Tagung <34, 2000, Saarbrücken>
European Metallographic Conference and Exhibition (EUROMET) <2000, Saarbrücken>
Englisch
Konferenzbeitrag
Fraunhofer IKTS ()

Abstract
The microstructure of various ceramic materials was investigated using scanning at. force microscopy by optimization of different ceramog. etching methods. Parameters of plasma-chemical, thermal, and chemical etching were optimized and the structure of nitridic, carbidic, and oxidic ceramics was detected in the nanometer range. Ceramics include Si3N4, SiC, LPSiC, zirconia, TiC, and alumina.

: http://publica.fraunhofer.de/dokumente/B-33520.html