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Silicon nitride and silicon dioxide thin insulating films VII

Proceedings of the international symposium. Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films to be held April 28 - May 2, in Paris as part of the 203rd meeting of the Electrochemical Society (ECS)
 
: Sah, R.E.
: Electrochemical Society -ECS-, Dielectric Science and Technology Division; Electrochemical Society -ECS-, Electronics Division

Pennington: Electrochemical Society, 2003, XII, 635 S.
Electrochemical Society. Proceedings, 2003-2
Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films <7, 2003, Paris>
International Symposium on Science and Technology of Dielectrics in Emerging Fields <1, 2003, Paris>
Electrochemical Society (Meeting) <203, 2003, Paris>
ISBN: 1-566-77347-4
Englisch
Tagungsband
Fraunhofer IAF ()

: http://publica.fraunhofer.de/dokumente/B-302341.html