Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

A modular approach for simulation-based optimization of MEMS

 
: Schneider, P.; Parodat, S.; Schneider, A.; Schwarz, P.

Courtois, B. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.; Nanyang Technological University Singapore:
Design, modeling, and simulation in microelectronics : 28 - 30 November 2000, Singapore. Conference on Design, Modeling, and Simulation in Microelectronics
Bellingham/Wash.: SPIE, 2000 (SPIE Proceedings Series 4228)
ISBN: 0-8194-3900-2
S.71-82
Conference on Design, Modeling, and Simulation in Microelectronics <2000, Singapore>
Englisch
Konferenzbeitrag
Fraunhofer IIS A ( IIS) ()

: http://publica.fraunhofer.de/dokumente/B-301166.html