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Microcrack evaluation for electronics components by AFM nano-DAC deformation measurements
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2001
Conference Paper
Titel
Microcrack evaluation for electronics components by AFM nano-DAC deformation measurements
Author(s)
Vogel, D.
Michel, B.
Hauptwerk
1st IEEE Conference on Nanotechnology 2001. Proceedings
Konferenz
Conference on Nanotechnology (NANO) 2001
DOI
10.1109/NANO.2001.966439
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM