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Micromaterials Center Berlin: Reliability research for MEMS
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2002
Conference Paper
Titel
Micromaterials Center Berlin: Reliability research for MEMS
Author(s)
Michel, B.
Winkler, T.
Hauptwerk
Nondestructive evaluation and reliability of micro- and nanomaterial systems
Konferenz
Conference "Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems" 2002
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM