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Micromachined pressure gauge for the vacuum range based on damping of a resonator

 
: Kurth, S.; Hiller, K.; Zichner, N.; Mehner, J.; Iwert, T.; Biehl, S.; Dötzel, W.; Gessner, T.

Helvajian, H. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MEMS components and applications for industry, automobiles, aerospace, and communication : 22 - 23 October 2001, San Francisco, USA
Bellingham/Wash.: SPIE, 2001 (SPIE Proceedings Series 4559)
ISBN: 0-8194-4287-9
S.103-111
Conference "MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication" <2001, San Francisco/Calif.>
Englisch
Konferenzbeitrag
Fraunhofer IZM ()

: http://publica.fraunhofer.de/dokumente/B-301137.html