Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Nanoporous dielectric materials for advanced CMOS
| Li, B.-Z.:
6th International Conference on Solid-State and Integrated-Circuit Technology 2001. Proceedings. Vol.1 : October 22 - 25, 2001, Shanghai, China
Piscataway, NJ, USA: IEEE Press, 2001
ISBN: 0-7803-6520-8
ISBN: 7-900081-60-7
S.343-347 |
| International Conference on Solid State and Integrated Circuit Technology (ICSICT) <6, 2001, Shanghai> |
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| Englisch |
| Konferenzbeitrag |
| Fraunhofer IZM () |