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Recent advances and trends in numerical techniques for process simulation
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1998
Journal Article
Titel
Recent advances and trends in numerical techniques for process simulation
Author(s)
Joppich, W.
Mijalkovic, S.
Zeitschrift
Microelectronics and reliabilities
DOI
10.1016/S0026-2714(97)00005-X
Language
English
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Fraunhofer-Institut für Algorithmen und Wissenschaftliches Rechnen SCAI