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Process simulation for nonplanar structures with the multigrid solver LiSS

 
: Strasser, R.; Nanz, G.; Joppich, W.

Baccarani, G.; Rudan, M.; Selberherr, S.; Stippel, H.; Strasser, E.:
Simulation of semiconductor devises and processes : Fifth International Conference on Simulation of Semiconductor Devices and Processes (SISDEP 93), held at the Technical University of Vienna, Austria, September 7 - 9, 1993
Wien: Springer, 1993 (Simulation of semiconductor devices and processes 5)
ISBN: 0-387-82504-5
ISBN: 3-211-82504-5
S.201-204
International Conference on Simulation of Semiconductor Devices and Processes (SISDEP) <5, 1993, Vienna>
Englisch
Konferenzbeitrag
Fraunhofer SCAI ()

: http://publica.fraunhofer.de/dokumente/930911.html