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  4. Directly heated quartz crystal microbalance with an integrated dielectric sensor
 
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1997
Conference Paper
Title

Directly heated quartz crystal microbalance with an integrated dielectric sensor

Abstract
Cross sensitivity, especially to humidity, is a common problem in the analysis of chemical gas sensor signals. To identify the contributions of two gas components at least two suitable signals are needed. This article presents a new chemical sensor unit which is a combination of a quartz crystal microbalance and a dielectric sensor. Thus it yields information about both the mass and the dielectrice of the same chemical sensitive film. To make this an universal element for gas sensing, a heater and a temperature gauge are also integrated directly on the quartz by thin film technology. This allows the application of temperature modulation techniques to the quartz microbalance principle.
Author(s)
Roth, M.
Dera, T.
Hillerich, B.
Drost, A.
Hartinger, R.
Wendler, F.
Endres, H.-E.
Mainwork
Eurosensors XI. Proceedings  
Conference
Eurosensors 1997  
Language
English
IFT  
Keyword(s)
  • capacitive sensor

  • CO2

  • gas sensor

  • interdigital capacitor

  • quartz micro balance

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