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Dickschicht-Feuchtesensor auf der Basis halbleitenden MnWO4-Metalloxids. Teil 2. Einfluß der Präparationsparameter auf Sensor-Eigenschaften

Thick-film humidity sensor based on MnWO4 semiconductive metal oxide. Part 2. Effect of preparation on the sensor characteristics
 
: Qu, W.; Meyer, J.-U.; Haeusler, A.

Technisches Messen : TM 63 (1996), No.3, pp.105-110
ISSN: 0340-837X
ISSN: 0171-8096 (Print)
ISSN: 2196-7113 (Online)
German
Journal Article
Fraunhofer IBMT ()
firing-profile; firing-sequence; humidity sensor; LiCl-additive; MnWO4 semiconductive metal oxide; MnWO4 semiconductor; preparation parameter; resistance-humidity dependence; sensor; thick-film humidity sensor

Abstract
The variation of the preparation parameters, such as the amount of LiCl-additive, firing profile and firing sequence, has a significant influence on the characteristics of the thick-film humidity sensor. The sensor characteristics are also affected by the working electrode materials. The paper describes the results of studies on the influences of different fabrication conditions on the resistance-humidity dependence of the thick-film humidity sensor.

: http://publica.fraunhofer.de/documents/PX-9793.html