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  4. Diamond windows for infrared and multispectral applications
 
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1998
Conference Paper
Title

Diamond windows for infrared and multispectral applications

Other Title
Diamantfenster für infrarote und multispektrale Anwendungen
Abstract
The low pressure deposition of polycrystalline diamond and the preparation of diamond windows at the Fraunhofer-IAF is reported. Using microwave plasma CVD, large area (2-6'' diameter) diamond wafers with thicknesses of up to 2 mm have been grown. The deposition is carried out in a novel microwave plasma system which uses an ellipsoid cavity to generate very intense, spatially extended plasmas. Several of these plasma reactors with 6 to 60 kW microwave power are presently used at the IAF. The diamond wafers are ground and polished and laser-cut to the desired dimensions. To assess the optical and thermal properties, the residual absorption in the 10 mu m range is determined by CO2 laser calorimetry, and temperature dependent and spatially resolved measurements of the thermal conductivity are performed. In addition, thermal expansion and refractive index measurements as a function of temperature are reported. Using high-purity process gases and optimized CVD conditions, diamond windows with a residual absorption at 10.6 mu m below 0. 1 cm(-1) and a thermal conductivity over 20 W/cmK have been realized. In addition, low dielectric losses of tan delta = 0.6x10(exp -4) at 140 GHz have been measured.
Author(s)
Koidl, P.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Wild, C.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Wörner, E.
Müller-Sebert, W.
Füner, M.
Locher, R.
Mainwork
Infrared technology and applications XXIV  
Conference
Conference on Infrared Technology and Applications 1998  
International Symposium on Optical Science, Engineering and Instrumentation 1998  
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Keyword(s)
  • chemical vapour deposition

  • CVD

  • Diamant

  • diamond

  • IR-Material

  • optical property

  • optical window

  • optische Eigenschaft

  • optisches Fenster

  • thermal property

  • thermische Eigenschaft

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