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Development of commercial CMOS process-based technologies for the fabrication of smart accelerometers

 

Institute of Electrical and Electronics Engineers -IEEE-:
Transducers '91. 6th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
New York/N.Y., 1991
ISBN: 0-87942-585-7
pp.416-419
International Conference on Solid-State Sensors and Actuators <6, 1991, San Francisco/Calif.>
English
Conference Paper
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/PX-9602.html