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Development and fabrication of a rotary micropump and its industrial and medical applications


Chau, K.; Roop, R.M. ; Sandia National Laboratories, Albuquerque/N.Mex; Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.; National Institute of Standards and Technology -NIST-:
Micromachined Devices and Components II
Bellingham, Wash.: SPIE, 1996 (SPIE Proceedings Series 2882)
ISBN: 0-8194-2280-0
Conference on Micromachined Devices and Components <2, 1996, Austin/Tex.>
Symposium on Micromachining and Microfabrication <1996, Austin/Tex.>
Conference Paper
Fraunhofer IPA ()
Feinwerktechnik; Fluidik; Gerotor; Kleinaktoren; Medizintechnik; Mikromotor; Mikropumpe; Mikrotechnologie

The development of small pumps in the area of microsystem technology has lead to many different prototypes, mainly using membranes. In contrast to this, a rotary working pump has been developed at IPA with which both an improvement in output, as well as pressures previously not possible have been reached. After a first prototype pump with an outer diameter of 10 mm an optimized prototype with an outer diameter of only 2.5 mm was fabricated in cooperaton with AGIE applying electro-discharge-machining. Presently IPA is working upon the design of a micromotor with the same functional principles. The applications of the new microhydraulic system are exceedingly numerous and extend from technical to medical products.