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  4. Development and characterization of microelectrode arrays by means of electrochemical and surface analysis methods.
 
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1994
Conference Paper
Title

Development and characterization of microelectrode arrays by means of electrochemical and surface analysis methods.

Author(s)
Wittkampf, M.
Naendorf, B.
Cammann, K.
Rospert, M.
Mokwa, W.
Hagenhoff, B.
Benninghoven, A.
Amrein, M.
Reichelt, R.
Gründig, B.
Mainwork
Eurosensors VIII. Book of Abstracts  
Conference
Eurosensors 1994  
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Keyword(s)
  • Dünnschichttechnik

  • Halbleitertechnologie

  • microelectrodes

  • Mikroelektrode

  • Oberflächenanalyse

  • semiconductor technology

  • Sensorik

  • surface analysis

  • thin films

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