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Design and fabrication of pendulum accelerometers based on thick polysilicon surface micromachining
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1996
Conference Paper
Titel
Design and fabrication of pendulum accelerometers based on thick polysilicon surface micromachining
Author(s)
Ruiz, O.
Samitier, J.
Wenk, B.
Reithmüller, W.
Ramos, J.
Hauptwerk
ESSDERC '96. 26th European Solid State Device Research Conference. Proceedings
Konferenz
European Solid State Device Research Conference (ESSDERC) 1996
Language
English
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Fraunhofer-Institut für Siliziumtechnologie ISIT