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Design and fabrication of pendulum accelerometers based on thick polysilicon surface micromachining

 
: Ruiz, O.; Samitier, J.; Wenk, B.; Reithmüller, W.; Ramos, J.

Baccarani, G.; Rudan, M.:
ESSDERC '96. 26th European Solid State Device Research Conference. Proceedings
Gif-sur-Yvette: Ed. Frontieres, 1996
ISBN: 2-86332-196-X
European Solid State Device Research Conference (ESSDERC) <26, 1996, Bologna>
English
Conference Paper
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/PX-9278.html