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  4. Depth profile analysis of hydrogenated carbon layers on silicon by x-ray photoelectron spectroscopy, Auger electron spectroscopy, electron energyloss spectroscopy, and secondary ion mass spectrometry
 
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1987
Journal Article
Title

Depth profile analysis of hydrogenated carbon layers on silicon by x-ray photoelectron spectroscopy, Auger electron spectroscopy, electron energyloss spectroscopy, and secondary ion mass spectrometry

Abstract
Hydrogenated amorphous carbon layers (a-C:H) on silicon show substantial amounts of silicon carbide in the interface, which has been identified with x-ray photoelectron spectroscopy and Auger electron spectroscopy by comparison to Si, C, and SiC standards. The quality of such layers, in particular, adhesion and hardness, becomes better with increasing width of the depth distribution of this interfacial carbide. (IAF)
Author(s)
Sander, P.
Kaiser, U.
Altebockwinkel, M.
Wiedmann, L.
Benninghoven, A.
Sah, R.E.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Koidl, P.
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Journal
Journal of vacuum science and technology A. Vacuum, surfaces and films  
Language
English
Fraunhofer-Institut für Angewandte Festkörperphysik IAF  
Keyword(s)
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