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Deposition of superhard amorphous carbon films by pulsed vacuum arc

 
: Schultrich, B.; Scheibe, H.J.; Siemroth, P.

5th International Conference on Plasma Surface Engineering 1996. Book of abstracts
Garmisch-Partenkirchen, 1996
International Conference on Plasma Surface Engineering <5, 1996, Garmisch-Partenkirchen>
English
Conference Paper
Fraunhofer IWS ()

: http://publica.fraunhofer.de/documents/PX-9239.html