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The deposition of hard crystalline Al2O3 layers by means of bipolar pulsed magnetron sputtering
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1996
Conference Paper
Title
The deposition of hard crystalline Al2O3 layers by means of bipolar pulsed magnetron sputtering
Author(s)
Fietzke, F.
Goedicke, K.
Hempel, W.
Mainwork
23rd International Conference on Metallurgical Coatings and Thin Films 1996. Papers presented at the Conference
Conference
International Conference on Metallurgical Coatings and Thin Films 1996
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
