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Deposition of ceramics by LPVD



Applied surface science (1992), No.54, pp.141-146 : Abb.,Lit.
ISSN: 0169-4332
Journal Article
Fraunhofer ILT ()
adhesion; application; ceramic; coating; vaporisation

The laser-assisted physical vapour deposition of ceramics is reported by photon-induced removal or vaporization of ceramic targets with subsequent deposition on stainless steel or hard metals. Different deposition conditions are achieved by variation of laser radiation parameters and processing variables especially variation of the flow characteristics and the composition of the processing gas to relate processing conditions to film dimensions as well as its resultant structural and mechanical properties. The structural properties of the deposited films are investigated by scanning electron microscopy and X-ray diffraction, the chemical ones by EDX spectroscopy. The films, which are highly compact without pores, are deduced to be amorphous and nearly stoichiometric with high adhesion strength.