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Dependence of the surface morphology and scattering of optical coatings on film material, substrate roughness, and deposition process

 
: Jakobs, S.; Feigl, T.; Duparre, A.

France, C. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Developments in optical component coatings : Tagung 15-16 May 1996, Glasgow
Bellingham, Wash.: SPIE, 1996 (Europto series)
ISBN: 0-8194-2161-8
pp.196-206
Conference "Developments in Optical Component Coatings" <1996, Glasgow>
English
Conference Paper
Fraunhofer IOF ()
atomic force microscopy; Dünne optische Schicht; Lichtstreuung; light scattering; Oberflächenrauheit; optical thin films; Rasterkraftmikroskopie; surface roughness

Abstract
Substrate properties, coating design, and deposition process determine the surface morphology of optical coatings. The contribution of each factor can be estimated by measuring the surface topography with a Scanning Force Microscope (SFM) and calculating the Power Spectral Density functions (PSD). We present results for oxide and fluoride coatings on well polished glass and silicon substrates. The scattering of the coatings is predicted by calculations based on SFM data and compared with results from angle resolved scattering measurements.

: http://publica.fraunhofer.de/documents/PX-9211.html