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Critical assessment of diamondlike carbon.

Kritische Bewertung diamantartiger Kohlenstoffschichten
 
: Koidl, P.

Electrochemical Society -ECS-:
1st International Symposium on Diamond and Diamond-like Films. Proceedings
1989 (Electrochemical Society. Proceedings 89-12)
pp.237-249 : Abb.,Tab.,Lit.
International Symposium on Diamond and Diamond-like Films <1, 1989>
English
Conference Paper
Fraunhofer IAF ()
amorpher Kohlenstoff; amorphous carbon; physical properties; physikalische Eigenschaft; plasma deposition; Plasmaabscheidung; structure

Abstract
An overview is given on the deposition, properties and applications of dense amorphous carbon films with diamondlike properties. Emphasis will be on the condensation of energetic hydrocarbon ions leading to the formation of amorphous hydrogenated carbon (a-C:H) films. Plasma deposition onto biased substrates and the structure and properties of the resulting a-C:H films are discussed.

: http://publica.fraunhofer.de/documents/PX-8805.html