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Crack avoidance and crack evaluation in microsystems
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1998
Conference Paper
Titel
Crack avoidance and crack evaluation in microsystems
Author(s)
Michel, B.
Hauptwerk
Micro System Technologies '98
Konferenz
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components 1998
Language
English
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Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM