English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Corner compensation techniques in anisotropic etching of 100-silicon using aqueous KOH
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
1991
Conference Paper
Title
Corner compensation techniques in anisotropic etching of 100-silicon using aqueous KOH
Author(s)
Offereins, H.L.
Kuhl, K.
Lang, W.
Sandmaier, H.
Mainwork
Transducers '91. 6th International Conference on Solid-State Sensors and Actuators. Digest of technical papers
Conference
International Conference on Solid-State Sensors and Actuators 1991
Language
English
IFT
