Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Controlled plasma-chemical deposition of polymer films from a liquid monomer
| 10th International Symposium on Plasma Chemistry '91. Vol.3. Proceedings
1991
pp.2.3-17/1-2.3-17/6 : Abb.,Tab.,Lit. |
| International Symposium on Plasma Chemistry <10, 1991, Bochum> |
|
| English |
| Conference Paper |
| Fraunhofer IGB () |
Abstract
A reaction chamber for plasma deposition, designed in view of industrial plasma processes, has been tested by plasma polymerization of tetramethoxysilane/oxygen mixtures on polycarbonate substrates. Deposition rates have been measured as a function of parameters such as total pressure, gas flows, and the substrate coordinates in relation to the electrode dimensions. The polymeric films are characterized by IR- spectroscopy, ESCA, and thickness measurements.