Kontaktfreie Widerstandstopographie semi-isolierender Substrate

: Jantz, W.; Stibal, R.

Abstract
High substrate resistivity is an important competitive asset of Ill-V semiconductors. It enhances the performance of ultrafast microelectronic and optoelectronic circuits. For a thorough on-line wafer quality control, a superior measurement system is required to evaluate resistivity fast, nondestructively and with high lateral resolution.