: Asadchikov, V.E.; Duparre, A.; Jakobs, S.; Karabekov, Y.; Kozhevnikov, I.V.

Abstract
The surface roughness of polished glass substrates and optical thin-film coatings is studied with atomic force microscopy and x-ray scattering. It is demonstrated that both methods permit the determination of power spectral density functions in a wide range of spatial frequencies. The results are in good quantitative agreement.