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  4. Comparative study of the roughness of optical surfaces and thin films by x-ray scattering and atomic force microscopy
 
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1999
Journal Article
Title

Comparative study of the roughness of optical surfaces and thin films by x-ray scattering and atomic force microscopy

Abstract
The surface roughness of polished glass substrates and optical thin-film coatings is studied with atomic force microscopy and x-ray scattering. It is demonstrated that both methods permit the determination of power spectral density functions in a wide range of spatial frequencies. The results are in good quantitative agreement.
Author(s)
Asadchikov, V.E.
Duparre, A.
Jakobs, S.
Karabekov, Y.
Kozhevnikov, I.V.
Journal
Applied optics  
DOI
10.1364/AO.38.000684
Language
English
Fraunhofer-Institut für Angewandte Optik und Feinmechanik IOF  
Keyword(s)
  • atomic force microscopy

  • surface roughness

  • thin films

  • x-ray scattering

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