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Comparative study of the roughness of optical surfaces and thin films by x-ray scattering and atomic force microscopy

: Asadchikov, V.E.; Duparre, A.; Jakobs, S.; Karabekov, Y.; Kozhevnikov, I.V.

	Applied optics 38 (1999), No.4, pp.684-691 ISSN: 0003-6935 ISSN: 1539-4522

	English
	Journal Article
	Fraunhofer IOF ()
	atomic force microscopy; surface roughness; thin films; x-ray scattering

Abstract
The surface roughness of polished glass substrates and optical thin-film coatings is studied with atomic force microscopy and x-ray scattering. It is demonstrated that both methods permit the determination of power spectral density functions in a wide range of spatial frequencies. The results are in good quantitative agreement.