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Comparative study of polysilicon-on-oxide using spectroscopy ellipsometry, atomic force microscopy and transformation electron microscopy

 

Collins, R.W.:
Spectroscopic ellipsometry. Proceedings of the 2nd International Conference on Spectroscopic Ellipsometry 1997
Amsterdam: Elsevier, 1998 (Thin solid films 313-314)
pp.259ff
International Conference on Spectroscopic Ellipsometry (ICSE) <2, 1997, Charleston/SC>
English
Conference Paper
Fraunhofer IIS B ( IISB) ()

: http://publica.fraunhofer.de/documents/PX-8160.html