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A combined TMAH and HF sacrificial layer etching technique for surface micromachined devices

 
: Lisec, T.; Kreutzer, M.; Wenk, B.; Wagner, B.

Markus, K.W. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Micromachining and Microfabrication Process Technology : 23-24 October 1995, Austin, Texas
Bellingham/Wash.: SPIE, 1995 (SPIE Proceedings Series 2639)
ISBN: 0-8194-2005-0
pp.286-293
Conference on Micromachining and Microfabrication Process Technology <1, 1995, Austin/Tex.>
English
Conference Paper
Fraunhofer ISIT ()

: http://publica.fraunhofer.de/documents/PX-8080.html