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Cobalt silicide formation caused by arsenic ion beam mixing and rapid thermal annealing

: Burte, E.P.; Min, Y.; Pei-Hsin, T.; Ryssel, H.

Nuclear instruments and methods in physics research, Section B. Beam interactions with materials and atoms 55 (1991), No.1-4, pp.773-777
ISSN: 0168-583X
International Conference on Ion Implantation Technology <8, 1990, Guildford>
Journal Article, Conference Paper
Fraunhofer IIS B ( IISB) ()