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Cobalt silicide formation caused by arsenic ion beam mixing and rapid thermal annealing
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1991
Journal Article
Title
Cobalt silicide formation caused by arsenic ion beam mixing and rapid thermal annealing
Author(s)
Burte, E.P.
Min, Y.
Pei-Hsin, T.
Ryssel, H.
Journal
Nuclear instruments and methods in physics research, Section B. Beam interactions with materials and atoms
Conference
International Conference on Ion Implantation Technology 1990
Language
English
IIS-B
