Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. Cobalt silicide formation caused by arsenic ion beam mixing and rapid thermal annealing
| Nuclear instruments and methods in physics research, Section B. Beam interactions with materials and atoms 55 (1991), No.1-4, pp.773-777
ISSN: 0168-583X |
| International Conference on Ion Implantation Technology <8, 1990, Guildford> |
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| English |
| Journal Article, Conference Paper |
| Fraunhofer IIS B ( IISB) () |