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  4. CO and CO2 thin-film SnO2 gas sensors on Si-substrates
 
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1994
Journal Article
Title

CO and CO2 thin-film SnO2 gas sensors on Si-substrates

Abstract
Thin-film SnO2 gas sensors have been structured on Si substrates. The sensors are temperature stable at 900 deg C in synthetic air for 48 h. No significant outdiffusion of the sensor layers can be observed after annealing. Pt catalysts lead to CO sensors without cross sensitivity to CO(2-) Pt/Ca catalyst combinations also lead to CO2 gas response. CO2 sensitivity between 1000 and 10000 ppm has been demonstrated at 270 deg C. CO2 might be indirectly detected via humidity exchange between CO2 and the heated Ca-catalysed SnO2 surface.
Author(s)
Hoefer, U.
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Kühner, G.  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Schweizer, W.
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Sulz, G.  
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Steiner, K.
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Journal
Sensors and Actuators. B  
DOI
10.1016/0925-4005(94)87009-8
Language
English
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Keyword(s)
  • carbon dioxide

  • carbon monoxide

  • gas sensors

  • silicon

  • tin oxide

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