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  4. CMOS integrated capacitive pressure transducer with on-chip electronics and digital calibration
 
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1991
Conference Paper
Title

CMOS integrated capacitive pressure transducer with on-chip electronics and digital calibration

Abstract
A capacitive pressure sensor with CMOS switched-capacitor circuitry for on-chip signal conditioning is introduced. It features differential generation and treatment of pressure-induced capacitance changes to suppress various parasitic effects. A digital calibration capability is provided in the form of a programmable capacitor array. The fabrication of the transducer is largely congruent with a standard n-well CMOS process. The paper explains the functioning of the circuitry and its implications for the sensor design and presents experimental results obtained in testing the various components of the transducer.
Author(s)
Kopystynski, P.
Mehlhorn, T.
Benzel, H.
Brockherde, W.
Obermeier, E.
Schnatz, F.V.
Schöneberg, U.
Mainwork
Transducers '91. 6th International Conference on Solid-State Sensors and Actuators. Digest of technical papers  
Conference
International Conference on Solid-State Sensors and Actuators 1991  
Language
English
Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS  
Keyword(s)
  • kapazitiver Drucksensor

  • Mikrosystem

  • Sensor-Elektronik

  • Sensorsystem

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