Closed loop MBE and CBE facility control with new software system

The new MBE/CBE control software works on IBM compatible PCs to its open, object oriented concept, the system is able to communicate with all kinds of control devices, irrespective of type or producer. Together with real time, in situ measurement devices, process parameters like actual growthrate or temperature are used for closed feedback loop control. E. g. results from RHEED measurements may be used to avoid transients. A C-like language is used to program even difficult processes. These automated processes are facility independent. Because of the interpreter/compiler concept, real time modification of a running program is possible.